Friday, December 2, 2016

United States Patent 9508610-Inline measurement of molding material thickness using terahertz reflectance

United States Patent 9508610
Liu, Shuhong (Chandler, AZ, US) 
Ghosh, Nilanjan Z. (Chandler, AZ, US) 
Wang, Zhiyong (Chandler, AZ, US) 
Goyal, Deepak (Phoenix, AZ, US) 
Gokhale, Shripad (Gilbert, AZ, US) 
Zhang, Jieping (Chandler, AZ, US)

A method including emitting a terahertz beam from a light source at a layer of molding material; detecting a reflectance of the beam; and determining a thickness of the layer of molding material. A system including a panel supporter operable to support a panel including a plurality of substrates arranged in a planar array; a light source operable to emit a terahertz beam at a panel on the panel supporter; a detector operable to detect a reflection of a terahertz beam emitted at a panel; and a processor operable to determine a thickness of a material on the panel based on a time delay for an emitted terahertz beam to be detected by the detector.

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