Hiroto Tomioka,
http://www.freshpatents.com/-dt20141211ptan20140361170.php
Terahertz wave detecting device, camera, imaging apparatus and measuring apparatusA terahertz wave detecting device which includes a substrate and a plurality of detection elements arranged above the substrate, wherein the detection element includes a first metal layer that is provided on the substrate, a support substrate that is provided to be spaced from the first metal layer, an absorbing section that is provided above the support substrate and which absorbs a terahertz wave to generate heat, and a converting section that includes a second metal layer, a pyroelectric layer, and a third metal layer layered on the absorbing section, and which converts the heat generated in the absorbing section into an electric signal. Related Terms: Camera Imaging |
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