Abstract-Terahertz Devices with EMXT Structure Fabricated by MEMS

Shengjie Yang, Hongda Lu, Zhipeng Liu, Yong Liu,  Bin Li , Xin Lv

https://ieeexplore.ieee.org/document/8563681

Due to the micro-dimension of terahertz devices and antennas, it requires more stringent processing technology. Micro-Electro-Mechanical Systems (MEMS) used to fabricate terahertz functional devices and antennas is a good choice for the high accuracy, good consistence and low cost. In this paper, one approach to obtain antennas and passive devices in terahertz band is proposed, which based on electromagnetic crystal structure and MEMS technology. The band-pass filter, 90° bend waveguide and H-plane horn antenna operating at terahertz band are presented as examples. All of them have good agreement between simulation and measurement.

Abstract-Experimental Realization of Terahertz Waveguide-Fed Circularly Polarized Double-Fan-Shaped Slot Antenna

Pengfei Zhao ;  Yong Liu ;  Hongda Lu ;  Yuming Wu ;  Xin Lv

http://ieeexplore.ieee.org/document/7904601/

A terahertz (THz) waveguide-fed circularly polarized double-fan-shaped slot antenna (DFSSA) based on a silicon micromachining technology is proposed. The antenna is fed by a WR1.9 waveguide. Optimized rotation angle of the double-fan-shaped slot can realize left-hand circular polarization or right-hand circular polarization. The measured axial ratios are lower than 1.5 dB from 490 to 500 GHz. The proposed DFSSA is suitable to be used as feeders in the THz imaging and detection systems.