A terahertz (THz) waveguide-fed circularly polarized double-fan-shaped slot antenna (DFSSA) based on a silicon micromachining technology is proposed. The antenna is fed by a WR1.9 waveguide. Optimized rotation angle of the double-fan-shaped slot can realize left-hand circular polarization or right-hand circular polarization. The measured axial ratios are lower than 1.5 dB from 490 to 500 GHz. The proposed DFSSA is suitable to be used as feeders in the THz imaging and detection systems.
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