Abstract-Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz

Jan Kappa, Dominik Sokoluk, Steffen Klingel, Corey Shemelya, Egbert Oesterschulze, Marco Rahm,

https://www.nature.com/articles/s41598-019-39152-y

We report the design, fabrication and experimental investigation of a spectrally wide-band terahertz spatial light modulator (THz-SLM) based on an array of 768 actuatable mirrors with each having a length of 220 μm and a width of 100 μm. A mirror length of several hundred micrometers is required to reduce diffraction from individual mirrors at terahertz frequencies and to increase the pixel-to-pixel modulation contrast of the THz-SLM. By means of spatially selective actuation, we used the mirror array as reconfigurable grating to spatially modulate terahertz waves in a frequency range from 0.97 THz to 2.28 THz. Over the entire frequency band, the modulation contrast was higher than 50% with a peak modulation contrast of 87% at 1.38 THz. For spatial light modulation, almost arbitrary spatial pixel sizes can be realized by grouping of mirrors that are collectively switched as a pixel. For fabrication of the actuatable mirrors, we exploited the intrinsic residual stress in chrome-copper-chrome multi-layers that forces the mirrors into an upstanding position at an inclination angle of 35°. By applying a bias voltage of 37 V, the mirrors were pulled down to the substrate. By hysteretic switching, we were able to spatially modulate terahertz radiation at arbitrary pixel modulation patterns.

Abstract-Electromagnetic behavior of spatial terahertz wave modulators based on reconfigurable micromirror gratings in Littrow configuration

Jan Kappa, Klemens M. Schmitt, and Marco Rahm

https://www.osapublishing.org/oe/abstract.cfm?uri=oe-25-17-20850


Efficient, high speed spatial modulators with predictable performance are a key element in any coded aperture terahertz imaging system. For spectroscopy, the modulators must also provide a broad modulation frequency range. In this study, we numerically analyze the electromagnetic behavior of a dynamically reconfigurable spatial terahertz wave modulator based on a micromirror grating in Littrow configuration. We show that such a modulator can modulate terahertz radiation over a wide frequency range from 1.7 THz to beyond 3 THz at a modulation depth of more than 0.6. As a specific example, we numerically simulated coded aperture imaging of an object with binary transmissive properties and successfully reconstructed the image.