Abstract-Uncooled antenna‐coupled terahertz thermal detector using CMOS process

Xu Wang,

https://onlinelibrary.wiley.com/doi/abs/10.1002/mop.32565

This article presents an uncooled monolithic resonant terahertz (THz) thermal detector using a standard 55 nm CMOS process without any postprocessing procedures. The detector is composed of a resonant loop antenna loaded with a polysilicon resistor and a proportional to absolute temperature (PTAT) sensor which is used as a temperature sensitive device. The basic operation principle, overall design considerations and relatively better measurement results are demonstrated. A maximum responsivity of 30.6 V/W and a minimum noise equivalent power (NEP) of 1.68 μW Hz for the thermal detector are measured at the operating frequency of 910 GHz