Peng Xiao, Xuecou Tu, Lin Kang, Zhenjie Li, Pengfei Chen, Shuyu Zhou, Xiaoqing Jia, Jian Chen, and Peiheng Wu
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| (a) Unit cell of the double-slot antennas designed for THz array detectors. (b) Results of E at the center (x=125 µm, y=125 µm, z=350 µm) of the antenna for different values of W1. (c) Distribution of E on the cross-section of the model in a periodic unit cell at 0.6255 THz. |
In flip chip packaging, the performance of terahertz (THz) array detectors is directly influenced by the flip chip. In addition, predicting this effect is difficult because the readout circuits in the flip chip are very complex. In this study, to reduce the influence of the flip chip, we design a new type of double-slot antennas for THz array detectors. For comparison, we designed and analyzed dipole antennas with the same period. Numerical simulations showed that the coupling efficiency of the double-slot array antennas at approximately 0.6255 THz does not degrade, if the flip chip structure is changed. However, in the case of dipole array antennas with the same period of 250 µm, coupling efficiency was severely affected by the flip chip structure. These results revealed that double-slot antennas are more applicable to THz array detectors compared with dipole antennas, as they can more effectively reduce the influence of the flip chip. Furthermore, we integrated the double-slot antennas into Nb5N6 THz array detectors using the micro-fabrication technology. Measurement results indicated that double-slot antennas possess the advantages of facile preparation and large-scale integration, which provide great potential for THz array detectors in flip chip packaging.
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