https://ieeexplore.ieee.org/document/8874526
Nanostructured metallic films have been proven to be an effective terahertz(THz) absorption layer for pyroelectric detectors. Improving the terahertz absorption can be achieved by adjusting the thickness and surface characteristics of nanostructured metallic film. To further enhance improve THz absorption, nanostructured NiCr film is prepared by chemical corrosionon. It is applied to the absorbing layer, which could enhanced the absorption. The proposed method improves THz response effectively for pyroelectric detectors. The THz responsivity for detector tested by lock in amplifier reaches 8.38×10 4 V/W and the lowest noise equivalent power value(NEP) reaches 1.27 × 10 -10 W/Hz 1/2 at 20Hz operating frequency use 2.52THz radiation, which is suitable for THz imaging application. Meanwhile it provides a feasible approach for fabricating high responsivity THz detector.
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