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Terahertz time-domain spectroscopy as well as all optical pump-probe techniques with ultrashort pulses relies on the exact knowledge of an optical delay between related laser pulses. Classical realizations of the measurement principle vary the optical path length for one of the pulses by mechanical translation of optical components. Most commonly, only an indirect measurement of the translation is carried out, which introduces inaccuracies due to imprecise mechanics or harsh environment. We present a comprehensive study on the effect of delay inaccuracies on the quality of terahertz spectra acquired with time-domain spectroscopy systems and present an interferometric technique to directly acquire the optical delay simultaneously to the terahertz measurement data. This measurement principle enables high-precision terahertz spectroscopy even in harsh environment with non-systematic disruptions.