My Note: I just saw this today but it appears to be dated back to 2012
http://www.laserfocusworld.com/articles/2012/11/thz-wafer-scanner-arp.html
http://www.arphotonics.net/terahertz_nanoscanner.htm
A
A paper for wafer inspection is here:
Effective testing for wafer reject minimization
by terahertz analysis and sub-surface imaging
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