Terahertz (THz) detectors have drawn much attention and have
been widely applied in imaging, spectroscopy, and sensing fields. An uncooled
monolithic resonant THz thermal detector implemented in a standard 55-nm CMOS
process is presented. The integration of a frequency selective metamaterial
(MM) absorber coupled with an optimized proportional-to-absolute temperature
(PTAT) sensor leads to an approach toward uncooled, compact, low-cost,
easy-integration, and mass-production THz detectors. The theoretical analysis,
design considerations, and characteristic measurements are demonstrated in
detail. The proposed thermal detector is designed to resonate at 2.58 THz for
the accessible THz source and the natural atmospheric window. The MM absorber
achieves near-perfect absorptivity of 98.6%, and the optimized PTAT sensor
obtains a high-temperature sensitivity of 10.11 mV / ° C. The calculated
responsivity is 49.81 V / W at 2.58 THz with a calculated
noise-equivalent power (NEP) of 0.78 μW / Hz0.5 at a modulation
frequency of 3 Hz. Relatively better experimental results are obtained at
2.58 THz with a maximum responsivity of 48.3 V / W and a minimum NEP of
1.06 μW / Hz0.5.
No comments:
Post a Comment