Abstract-High Throughput Laser Process of Transparent Conducting Surfaces for Terahertz Bandpass Ultrathin Metamaterials

Qinghua Wang, Michaella Raglione, Baojia Li, Xin Jin, Fatima Toor, Mark Arnold, Hongtao Ding

https://www.nature.com/articles/s41598-019-38949-1

Terahertz (THz) imaging has attracted much attention within the past decade as an emerging nondestructive evaluation technique. In this paper, we present a novel Laser-based Metamaterial Fabrication (LMF) process for high-throughput fabrication of transparent conducting surfaces on dielectric substrates such as glass, quartz and polymers to achieve tunable THz bandpass characteristics. The LMF process comprises two steps: (1) applying ultrathin-film metal deposition, with a typical thickness of 10 nm, on the dielectric substrate; (2) creating a ~100-micron feature pattern on the metal film using nanosecond pulsed laser ablation. Our results demonstrate the use of laser-textured ultra-thin film with newly integrated functional capabilities: (a) highly conductive with ~20 Ω/sq sheet resistance, (b) optically transparent with ~70% transmittance within visible spectrum, and (c) tunable bandpass filtering effect in the THz frequency range. A numerical analysis is performed to help determine the fundamental mechanism of THz bandpass filtering for the LMF-built samples. The scientific findings from this work render an economical and scalable manufacturing technique capable of treating large surface area for multi-functional metamaterials.