Wednesday, August 27, 2014
Abstract-MEMS reconfigurable metamaterial for terahertz switchable filter and modulator
Optics Express, Vol. 22, Issue 18, pp. 21326-21339 (2014)
We demonstrate a reconfigurable metamaterial developed by surface micromachining technique on a low loss quartz substrate for a tunable terahertz filter application. The device implements a reconfigurable RF-MEMS (radio frequency – micro electro mechanical systems) capacitor within a split-ring resonator (SRR). Time-domain spectroscopy confirms that the tunability of the SRR resonance and thus the terahertz transmittance are electrostatically controlled by the RF-MEMS capacitor. Due to the high transparency and low loss of quartz used as a substrate, the device exhibits a high contrast switching performance of 16.5 dB at 480 GHz, which is also supported by the terahertz dynamic modulation measurement results. The device shows promise for tunable transmission terahertz optics.
© 2014 Optical Society of America