Single receiving element of superconducting terahertz hot-electron bolometer incorporated into a planar antenna

                                                 Array of superconducting terahertz hot-electron 

A. Vystavkin, A. Kuzmin, S. Shitov, A. Kovalenko, I. Kon, A. Uvarov, et al.
MIPT (SEC Nanotechnology), Institute of Radioengineering and Electronics (IRE) of RAS , Moscow, Russia
Equipment: SEM JEOL JSM-6460

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The structure is a single receiving device - a component of high-sensitivity matrix radiometer for detecting radiation in the terahertz region. As a sensing element a superconductor transition at the edge of a small volume (in the center) is used. The largest fragment in the middle of structure is a double-slit planar antenna.