US Patent-Nano- and micro-electromechanical resonators

United States Patent 9705469

Rinaldi, Matteo (Boston, MA, US) 
Qian, Zhenyun (Boston, MA, US) 
Hui, Yu (Billerica, MA, US)

http://www.freepatentsonline.com/9705469.html

 A resonator including a piezoelectric plate and an interdigital electrode is provided. A ratio between a thickness of the plate and a pitch of the interdigital electrode may be from about 0.5 to about 1.5. A radiation detector including a resonator and an absorber layer capable of absorbing at least one of infrared and terahertz radiation is provided. A resonator including a piezoelectric plate and a two-dimensional electrically conductive material is provided....

Provided in another embodiment is a radiation detector including a resonator and an absorber layer. The absorber layer may be capable of absorbing at least one of infrared and terahertz radiation.