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Thursday, July 13, 2017
US Patent-Nano- and micro-electromechanical resonators
United States Patent 9705469 Rinaldi, Matteo (Boston, MA, US) Qian, Zhenyun (Boston, MA, US) Hui, Yu (Billerica, MA, US) http://www.freepatentsonline.com/9705469.html A resonator including a piezoelectric plate and an interdigital
electrode is provided. A ratio between a thickness of the plate and a
pitch of the interdigital electrode may be from about 0.5 to about 1.5. A
radiation detector including a resonator and an absorber layer capable
of absorbing at least one of infrared and terahertz radiation is
provided. A resonator including a piezoelectric plate and a
two-dimensional electrically conductive material is provided.... Provided in another embodiment is a radiation detector including a resonator and an absorber layer. The absorber layer may be capable of absorbing at least one of infrared and terahertz radiation.
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