Abstract-Ultrashort Pulsed-Laser Fabrication of Silicon Moth-Eye Structures for Terahertz Anti-Reflection

Haruyuki Sakurai, Natsuki Nemoto, Kuniaki Konishi, Yuki Sakurai, Nobuhiko Katayama, Tomotake Matsumura, Junji Yumoto, and Makoto Kuwata-Gonokami

https://www.osapublishing.org/abstract.cfm?uri=cleo_qels-2018-JW2A.77&origin=search

We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.

© 2018 The Author(s)