Abstract-The design of Nb5N6 microbolometer detector for 0.3 THz detector

Chengtao Jiang; Xuecou Tu,  Peng Xiao,  Shimin Zhai,  Xiaoqing Jia,  Lin Kang, Jian Chen,  Peiheng Wu

https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10531/1053123/The-design-of-Nbsub5-subNsub6-sub-microbolometer-detector-for-03/10.1117/12.2292539.short

We design and simulate planar antenna structure on the high- resistivity silicon substrate(ρ=1000Ω·cm) for the Nb5N6 micro- bolometer at the frequency range from 0.265 THz to 0.365 THz by CST Studio Suite. We have obtained the center frequency of the antenna at 0.3 THz by optimizing parameters of the antenna structure and the antenna has the very good radiation directivity. And the maximum directivity of the antenna is around 8.634 dBi at 0.3THz. The measured best voltage response of the Nb₅N₆ micro-bolometer detector is at 0.307 THz. The measured response frequency and the simulated S-parameter are in substantial agreement.

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