Fault Isolation and Interconnect Inspection of Advanced IC Packages with the Electro Optical Terahertz Pulse Reflectometry (EDOTPR 5000)

http://www.azom.com/equipment-details.aspx?EquipID=4409

Electro Optical Terahertz Pulse Reflectometry (EOTPR), developed by TeraView, is an innovative terahertz-based time domain reflectometry (TDR) technology ideal for fault isolation and interconnect inspection of advanced IC packages.

TeraView’s proprietary EOTPR technology is used by the EOTPR 5000 to detect interconnect quality with the full automation, rapid measurement speed, and high throughput needed in the currently existing high volume manufacturing environments. Additionally, it is considered to be the only IC interconnect inspection technique currently available that works at the forefront of location accuracy and detection sensitivity.

The advanced IC packages currently available are susceptible to warpage-induced interconnect failures, including conditions such as head-in-pillow defects that occur in Package-on-Package (PoP) devices. These marginal or weak interconnect conditions may not be captured by electrical or logic testers.

The superior sensitivity and accuracy of the EOTPR 5000 can be used to detect minute shifts in impedance from weak or marginal interconnects after accelerated life or high temperature cycle tests. In this manner, it is possible to reduce manufacturing variations, improving packaging-related yields.

Product Features

The key features of the EOTPR 5000 are as follows:

• Supports SECS/GEM factory automation interfaces
• Compatible with BGA’s in the range of 400 µm to 1 mm
• Fully automated device binning capability
• Fully automated probing, recipe creation and service/maintenance mode
• A full software suite to enable data collection and analysis
• Automatic probe calibration to determine the position of the signal and ground probe tips

TeraView EOTPR 5000

Fully Automated Advanced IC Packaging Inspection System

System Specifications

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Dimensions (LxWxH)	96 x 213 x 170 cm (excluding JEDEC tray loader)
Weight (approximate)	1000 kg
Electrical Power Requirements	1 x 32 amp, 220 volt supply
Compressed Air Requirements	1 x at 60 – 80 psi