Structuring at subwavelength scales brings out artificial media with anomalous optical features called metamaterials. All-dielectric metamaterials have high potential for practical applications over the whole electromagnetic spectrum owing to low loss and optical isotropy. Here, we report subwavelength silicon through-hole arrays as an all-dielectric gradient indexmetamaterial with broadband THz operation. The unit cell consists of a single subwavelength through-hole on highly resistive monocrystalline silicon. Depending on the fill-factor and period, the effective index was linearly modulated at 0.3–1.6 THz. The experimental results also demonstrate silicon gradient refractive index (Si-GRIN) lenses with parabolic index profiles through the spatial modification of a single unit cell along the radial direction. Si-GRIN lenseseither focus 0.4–1.6 THz beam to the diffraction-limit or serve as a flat and thin solid immersion lens on the backside of THz photoconductive antenna for highly efficient pulse extraction. This all-dielectric gradient index metamaterial opens up opportunities for integrated THz GRINoptics.
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