Liangping Xia, Hongyan Mao, Xinqun Zhang, Suihu Dang, Wenjuan Yan, Songbai Li,
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10848/1084808/Low-loss-terahertz-devices-based-on-polymer-substrate/10.1117/12.2505147.short?SSO=1
The fabrication method of hard template
substrate supporting in the lithography process is proposed to realize THz
devices based on low loss polymer substrate with large effective area. Based on
this method, the THz polarizer with single layered and double layered grating
structure are fabricated and measured. The transmission spectra indicates that
the loss of the polarizer is low and the polarization extinction ratio is as
high as 55dB and 70dB for single and double layered samples respectively. The
THz band stop filter result indicates that the loss keeps low and the filter
band width is wider for the multi-layered metallic structure.
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