Abstract-Terahertz-driven polymerization of resists in nanoantennas

Woongkyu Park, Youjin Lee, Taehee Kang, Jeeyoon Jeong,  Dai-Sik Kim

https://www.nature.com/articles/s41598-018-26214-w


Plasmon-mediated polymerization has been intensively studied for various applications including nanolithography, near-field mapping, and selective functionalization. However, these studies have been limited from the near-infrared to the ultraviolet regime. Here, we report a resist polymerization using intense terahertz pulses and various nanoantennas. The resist is polymerized near the nanoantennas, where giant field enhancement occurs. We experimentally show that the physical origin of the cross-linking is a terahertz electron emission from the nanoantenna, rather than multiphoton absorption. Our work extends nano-photochemistry into the terahertz frequencies.