Abstract-Electromechanically tunable metasurface transmission waveplate at terahertz frequencies

Xiaoguang Zhao, Jacob Schalch, Jingdi Zhang, Huseyin R. Seren, Guangwu Duan, Richard D. Averitt, and Xin Zhang

https://www.osapublishing.org/optica/abstract.cfm?uri=optica-5-3-303

Dynamic polarization control of light is essential for numerous applications ranging from enhanced imaging to material characterization and identification. We present a reconfigurable terahertz metasurface quarter-wave plate consisting of electromechanically actuated microcantilever arrays. Our anisotropic metasurface enables tunable polarization conversion through cantilever actuation. Specifically, voltage-based actuation provides mode-selective control of the resonance frequency, enabling real-time tuning of the polarization state of the transmitted light. The polarization tunable metasurface has been fabricated using surface micromachining and characterized using terahertz time domain spectroscopy. We observe a ∼230  GHz$\sim 230\mathrm{GHz}$ cantilever actuated frequency shift of the resonance mode, sufficient to modulate the transmitted wave from pure circular polarization to linear polarization. Our CMOS-compatible tunable quarter-wave plate enriches the library of terahertz optical components, thereby facilitating practical applications of terahertz technologies.

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