United States Patent 9508610-Inline measurement of molding material thickness using terahertz reflectance

United States Patent 9508610
Inventors:
Liu, Shuhong (Chandler, AZ, US) 
Ghosh, Nilanjan Z. (Chandler, AZ, US) 
Wang, Zhiyong (Chandler, AZ, US) 
Goyal, Deepak (Phoenix, AZ, US) 
Gokhale, Shripad (Gilbert, AZ, US) 
Zhang, Jieping (Chandler, AZ, US)

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A method including emitting a terahertz beam from a light source at a layer of molding material; detecting a reflectance of the beam; and determining a thickness of the layer of molding material. A system including a panel supporter operable to support a panel including a plurality of substrates arranged in a planar array; a light source operable to emit a terahertz beam at a panel on the panel supporter; a detector operable to detect a reflection of a terahertz beam emitted at a panel; and a processor operable to determine a thickness of a material on the panel based on a time delay for an emitted terahertz beam to be detected by the detector.