Abstract-Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging

F. Simoens ; J. Meilhan ; S. Gidon ; G. Lasfargues ; J. Lalanne Dera ; J. L. Ouvrier-Buffet ; S. Pocas ; W. Rabaud ; F. Guellec ; B. Dupont ; S. Martin ; A. C. Simon

[-] Author Affiliations

F. Simoens, J. Meilhan, S. Gidon, G. Lasfargues, J. Lalanne Dera, J. L. Ouvrier-Buffet,S. Pocas, W. Rabaud, F. Guellec, B. Dupont, S. Martin

CEA-LETI (France)

http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1743250

CEA-Leti has developed a monolithic large focal plane array bolometric technology optimized for 2D real-time imaging in the terahertz range. Each pixel consists in a silicon microbolometer coupled to specific antennas and a resonant quarter-wavelength cavity. First prototypes of imaging arrays have been designed and manufactured for optimized sensing in the 1-3.5THz range where THz quantum cascade lasers are delivering high optical power. NEP in the order of 1 pW/sqrt(Hz) has been assessed at 2.5 THz. This paper reports the steps of this development, starting from the pixel level, to an array associated monolithically to its CMOS ROIC and finally a stand-alone camera. For each step, modeling, technological prototyping and experimental characterizations are presented. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.