Patent Application-Terahertz-infrared ellipsometer system, and method of use

United States Patent 8934096
Application Number: 13/506707
Publication Date: 01/13/2015
Herzinger, Craig M. (Lincoln, NE, US) 
Schubert, Mathias M. (Lincoln, NE, US) 
Hofmann, Tino (Lincoln, NE, US) 
Liphardt, Martin M. (Lincoln, NE, US) 
Woollam, John A. (Lincoln, NE, US) 
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The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including:

• • a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and
  • a detector such as a Golay cell; a bolometer or a solid state detector;
    and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.